High contact angle fluorosulfonamide-based materials for immersion lithography
- Daniel P. Sanders
- Linda K. Sundberg
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
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2 results for Yoshiharu Terui
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
- Hiroshi Ito
- Linda K. Sundberg
- et al.
- 2009
- SPIE Advanced Lithography 2009