Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
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This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results for Taiichi Furukawa
Characterization of vinyl ether UV-cure nanoimprint resist
- Taiichi Furukawa
- Frances A. Houle
- et al.
- 2009
- SPIE Advanced Lithography 2009