Evaluation of easily removable pellicle adhesive
- Nancy Zhou
- Monica Barrett
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
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Evaluation of 32nm Advanced immersion lithography pellicles
- N. Zhou
- K. Racette
- et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008