Negative photoresists for optical lithography
- J.M. Shaw
- J. Gelorme
- et al.
- 1997
- IBM J. Res. Dev
Publications
Date
Featured collections
Popular topics
12 results for Nancy LaBianca
Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures