Publications

2 results for Greg Prokopowicz

Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- - Cong Liu
  - Joseph Lachowski
  - et al.
- 2025
- SPIE Advanced Lithography 2025
A new breed of wet-developable BARC materials
- - Libor Vyklicky
  - Wu-Song Huang
  - et al.
- 2009
- J. Photopolym. Sci. Tech.