Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- P.A. Ercius
- D.A. Muller
- et al.
- 2006
- M&M 2006
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4 results for Peter Ercius
Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- Peter Ercius
- David A. Muller
- et al.
- 2006
- AMC 2006
Three-dimensional measurement of line edge roughness in copper wires using electron tomography
- Peter Ercius
- Lynne M. Gignac
- et al.
- 2009
- Microscopy and Microanalysis
Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
- Peter Ercius
- Matthew Weyland
- et al.
- 2006
- Applied Physics Letters