Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
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5 results for Rebecca Mih
Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
A high performance 0.13 μm copper BEOL technology with low-k dielectric
- R.D. Goldblatt
- B.N. Agarwala
- et al.
- 2000
- IITC 2000
CMOS with active well bias for low-power and RF/analog applications
- Clement Wann
- Jay Harrington
- et al.
- 2000
- Digest of Technical Papers-Symposium on VLSI Technology
0.18 um modular triple self-aligned embedded split-gate flash memory
- Rebecca Mih
- Jay Harrington
- et al.
- 2000
- Digest of Technical Papers-Symposium on VLSI Technology