Kinetics of Ni3Si2 formation in the Ni 2Si-NiSi thin film reaction from in situ measurements
- J.A. Kittl
- M.A. Pawlak
- et al.
- 2007
- Applied Physics Letters
Publications
5 results for Serge Biesemans
Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully silicided gate applications
- J.A. Kittl
- M.A. Pawlak
- et al.
- 2007
- Applied Physics Letters
Scalability and biasing strategy for CMOS with active well bias
- S. Huang
- C. Wann
- et al.
- 2001
- VLSI Technology 2001
Modular 0.13 μm bulk CMOS technology for high performance and low power applications
- L.K. Han
- S. Biesemans
- et al.
- 2000
- VLSI Technology 2000
CMOS with active well bias for low-power and RF/analog applications
- Clement Wann
- Jay Harrington
- et al.
- 2000
- Digest of Technical Papers-Symposium on VLSI Technology