Improving yields of high performance 65 nm chips with sputtering top surface of dual stress liner
- Huilong Zhu
- Daewon Yang
- et al.
- 2007
- VLSI Technology 2007
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.