32nm general purpose bulk CMOS technology for high performance applications at low voltageF. ArnaudJ. Liuet al.2008IEDM 2008
A cost effective 32nm high-K/metal gate CMOS technology for low power applications with single-metal/gate-first processX. ChenS. Samavedamet al.2008VLSI Technology 2008
Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitratesTiezhong MaStephen A. Campbellet al.2001IEEE Transactions on Electron Devices