Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for R.M. Wallace

High performance gate first HfSiON dielectric satisfying 45nm node requirements
- - M.A. Quevedo-Lopez
  - S. Krishnan
  - et al.
- 2005
- IEDM 2005
High resolution profiling using ion scattering and resonant nuclear reactions
- - R.P. Pezzi
  - R.M. Wallace
  - et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
Mobility and charge trapping comparison for crystalline and amorphous HfON and HfSiON gate dielectrics
- - P.D. Kirsch
  - M.A. Quevedo-Lopez
  - et al.
- 2006
- Applied Physics Letters
Interaction of HfO₂/SiO₂/Si structures with deuterium gas
- - C. Driemeier
  - L. Miotti
  - et al.
- 2006
- Applied Physics Letters