Publications

2 results for Shozo Shirai

Graded spin-on organic bottom antireflective coating for high NA lithography
- - Dario L. Goldfarb
  - Sean D. Burns
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Graded spin-on organic bottom antireflective coating for high na immersion lithography
- - Dario L. Goldfarb
  - Libor Vyklicky
  - et al.
- 2008
- J. Photopolym. Sci. Tech.