Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
- M. Schvartzman
- A. Mathur
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
Date
Featured collections
Popular topics
2 results for M. Schvartzman
Plasma fluorination of carbon-based materials for imprint and molding lithographic applications
- M. Schvartzman
- A. Mathur
- et al.
- 2008
- Applied Physics Letters