Role of chamber dimension in fluorocarbon based deposition and etching of Si O2 and its effects on gas and surface-phase chemistry
- E. Joseph
- B.-S. Zhou
- et al.
- 2008
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Effects of pore morphology on the diffusive properties of a porous low- κ dielectric
- E. Joseph
- S.P. Sant
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures