Interaction of SiC thermal oxidation by-products with SiO2
- C. Radtke
- F.C. Stedile
- et al.
- 2008
- Applied Physics Letters
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Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
- R.P. Pezzi
- C. Krug
- et al.
- 2008
- Applied Physics Letters