Effect of additives on shape evolution during electrodeposition: III. Trench infill for on-chip interconnects
- Yan Qin
- Xiaohai Li
- et al.
- 2008
- JES
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3 results for Richard C. Alkire
Effect of additives on shape evolution during electrodeposition
- Effendi Rusli
- Feng Xue
- et al.
- 2007
- JES
Effect of benzotriazole on the anisotropic electrolytic etching of copper
- Demetrius Papapanoyiotou
- Hariklia Deligianni
- et al.
- 1998
- JES