Compensating non-optical effects using electrically-driven optical proximity correction
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2009
- SPIE Advanced Lithography 2009
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SRAM local bit line access failure analyses
- Praveen Elakkumanan
- Jente B. Kuang
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- 2006
- ISQED 2006