Relaxation kinetics of nanoscale indents in a polymer glass
- A.W. Knoll
- D. Wiesmann
- et al.
- 2009
- Physical Review Letters
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50 results for Urs Duerig
Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication
- Heiko Wolf
- Yu Kyoung Ryu
- et al.
- 2019
- Pan Pacific 2019
High throughput lithography using thermal scanning probes
- Colin D. Rawlings
- Martin Spieser
- et al.
- 2017
- TRANSDUCERS 2017
A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon
- Christopher L. Ayala
- Daniel Grogg
- et al.
- 2014
- ESSDERC 2014
Nanometer control of the markerless overlay process using thermal scanning probe lithography
- Colin Rawlings
- Urs Duerig
- et al.
- 2014
- AIM 2014
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Amorphous carbon active contact layer for reliable nanoelectromechanical switches
- Daniel Grogg
- Christopher L. Ayala
- et al.
- 2014
- MEMS 2014
NEM switch technologies for low-power logic applications
- Daniel Grogg
- Yu Pu
- et al.
- 2012
- SENSORS 2012
Direct Write 3-dimensional nanopatterning using probes
- Armin Knoll
- Felix Holzner
- et al.
- 2010
- FNANO 2010
Direct write 3-dimensional nanopatterning using probes
- David Pires
- Armin Knoll
- et al.
- 2010
- SPIE Advanced Lithography 2010