Publications

2 results for Andrew J. Merriam

A solid-state 193 nm laser with high spatial coherence for sub-40 nm interferometric immersion lithography
- - Andrew J. Merriam
  - Donald S. Bethune
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Efficient nonlinear frequency conversion to 193-nm using cooled BBO
- - Andrew J. Merriam
  - James J. Jacob
  - et al.
- 2007
- ASSP 2007