CMOS transistor processing compatible with monolithic 3-D integration
- B. Rajendran
- R.S. Shenoy
- et al.
- 2005
- VMIC 2005
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Low thermal budget processing for sequential 3-D IC fabrication
- Bipin Rajendran
- Rohit S. Shenoy
- et al.
- 2007
- IEEE Transactions on Electron Devices