Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes
- Yu Zhu
- Kathleen A. Dunn
- et al.
- 2007
- Journal of Materials Research
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Chemical vapor deposition of ZnS:Mn for thin-film electroluminescent display applications
- Anna W. Topol
- Kathleen A. Dunn
- et al.
- 2004
- Journal of Materials Research