Measurements of water distribution in thin lithographic films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Microlithography 2004
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30 results for Eric K. Lin
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- Tengjiao Hu
- Ronald L. Jones
- et al.
- 2004
- Journal of Applied Physics
Formation of deprotected fuzzy blobs in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
Interfacial effects on moisture absorption in thin polymer films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Langmuir
Structural characterization of porous low-k thin films prepared by different techniques using x-ray porosimetry
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2004
- Journal of Applied Physics
Near edge x-ray absorption fine structure measurements of surface segregation in 157 nm photoresist blends
- Erin L. Jablonski
- Vivek M. Prabhu
- et al.
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Polymer dynamics and diffusive properties in ultra-thin photoresist films
- Christopher L. Soles
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
Deprotection volume characteristics and line edge morphology in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2003
- Microlithography 2003
Polyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- Vivek M. Prabhu
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
X-ray absorption spectroscopy to probe interfacial issues in photolithography
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2003
- Microlithography 2003