Imaging thin films of nanoporous low-k dielectrics: Comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy
- Leslie E. Thompson
- Philip M. Rice
- et al.
- 2005
- Microscopy and Microanalysis
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.