Thermal and electromigration-induced strains in copper conductor lines: X-ray microbeam measurements and analysis
- G. Wang
- H. Zhang
- et al.
- 2006
- MRS Spring Meeting 2006
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Thermal and electromigration-induced strains in polycrystalline films and conductor lines: X-ray microbeam measurements and analysis
- G.S. Cargill III
- L.E. Moyer
- et al.
- 2005
- International Workshop on Stress-Induced Phenomena in Metallization 2005