Ultra-small single-crystal silicon cantilevers for scanning force microscopes
- J.L. Yang
- M. Despont
- et al.
- 2004
- MEMS 2004
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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3 results for P.L.T.M. Frederix
Miniaturized single-crystal silicon cantilevers for scanning force microscopy
- J.L. Yang
- M. Despont
- et al.
- 2005
- Applied Physics Letters
A Fabry-Perot interferometer for micrometer-sized cantilevers
- B.W. Hoogenboom
- P.L.T.M. Frederix
- et al.
- 2005
- Applied Physics Letters