Water immersion of model photoresists: Interfacial influences on water concentration and surface morphology
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2005
- Journal of Microlithography, Microfabrication and Microsystems
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Interfacial effects on moisture absorption in thin polymer films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Langmuir