Hafnium oxide gate dielectrics grown from an alkoxide precursor: Structure and defects
- Martin M. Frank
- Safak Sayan
- et al.
- 2004
- Materials Science and Engineering: B
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Structural, electronic, and dielectric properties of ultrathin zirconia films on silicon
- S. Sayan
- N.V. Nguyen
- et al.
- 2005
- Applied Physics Letters