Interfacial glass transition profiles in ultrathin, spin cast polymer films
- Scott Sills
- René M. Overney
- et al.
- 2004
- Journal of Chemical Physics
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Characterization of new aromatic polymers for 157 nm photoresist applications
- N. Fender
- P.J. Brock
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering