SODEL FET: Novel channel and source/drain profile engineering schemes by selective Si epitaxial growth technology
- Satoshi Inaba
- Kiyotaka Miyano
- et al.
- 2004
- IEEE Transactions on Electron Devices
Publications
Date
Featured collections
Popular topics
2 results for Satoshi Inaba
Nitrogen-induced transient enhanced diffusion of dopants
- Cheruvu Murthy
- Kilho Lee
- et al.
- 2002
- Applied Physics Letters