Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for T.J. Hu

Preliminary evaluation of line edge roughness metrology based on CD-SAXS
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2004
- SPIE Advanced Lithography 2004
Deprotection volume characteristics and line edge morphology in chemically amplified resists
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2003
- Microlithography 2003
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- - Tengjiao Hu
  - Ronald L. Jones
  - et al.
- 2004
- Journal of Applied Physics
Formation of deprotected fuzzy blobs in chemically amplified resists
- - Ronald L. Jones
  - Tengjiao Hu
  - et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
Brillouin Scattering Studies of Polymeric Nanostructures
- - R. Hartschuh
  - Y. Ding
  - et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics