Toughening of nanoporous glasses using porogen residuals
- Daniel A. Maidenberg
- Willi Volksen
- et al.
- 2004
- Nature Materials
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Effects of templating byproducts on adhesion of nanoporous dielectric films
- D. Maidenberg
- W. Volksen
- et al.
- 2003
- IITC 2003