Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography
- Alex K. Raub
- A. Frauenglass
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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3 results for S.R.J. Brueck
Deep-UV immersion interferometric lithography
- Alex K. Raub
- A. Frauenglass
- et al.
- 2004
- SPIE Advanced Lithography 2004
Precise tuning of the switching field in 'implantation patterned' Co/Pt multilayers
- V. Metlushko
- G.W. Crabtree
- et al.
- 2001
- ISDRS 2001