Probabilistic model for the mechanism of phenolic polymer dissolution
- Lewis W. Flanagin
- Christopher L. McAdams
- et al.
- 1998
- Microlithography 1998
Publications
Date
Featured collections
Popular topics
3 results for Christopher L. McAdams
Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists
- Peter I. Tattersall
- David Breslin
- et al.
- 2004
- Chemistry of Materials
Mechanism of phenolic polymer dissolution: importance of acid-base equilibria
- Lewis W. Flanagin
- Christopher L. McAdams
- et al.
- 1999
- Macromolecules