Publications

2 results for John Quintana

Cross section and critical dimension metrology in dense high aspect ratio patterns with CD-SAXS
- - Ronald L. Jones
  - Eric K. Lin
  - et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- - Tengjiao Hu
  - Ronald L. Jones
  - et al.
- 2004
- Journal of Applied Physics