Studies of acid diffusion in low Ea chemically amplified photoresists
- G.M. Wallraff
- D. Medeiros
- et al.
- 2005
- Microlithography 2005
Publications
6 results for Karen Temple
Sub-50 nm half-pitch imaging with a low activation energy chemically amplified photoresist
- G.M. Wallraff
- D. Medeiros
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
- Dario L. Goldfarb
- Arpan P. Mahorowala
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Impact of thin resist processes on post-etch LER
- Arpan P. Mahorowala
- Dario L. Goldfarb
- et al.
- 2003
- Microlithography 2003
Transition metal-catalyzed formation of boron-nitrogen bonds: Catalytic dehydrocoupling of amine-borane adducts to form aminoboranes and borazines
- Cory A. Jaska
- Karen Temple
- et al.
- 2003
- JACS
Spontaneous vertical ordering and pyrolytic formation of nanoscopic ceramic patterns from poly(styrene-b-ferrocenylsilane)
- Karen Temple
- Kevin Kulbaba
- et al.
- 2003
- Advanced Materials