Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- Spyridon Skordas
- Filippos Papadatos
- et al.
- 2002
- MRS Proceedings 2002
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2 results for Guillermo M. Nuesca
Chemical vapor deposition of ZnS:Mn for thin-film electroluminescent display applications
- Anna W. Topol
- Kathleen A. Dunn
- et al.
- 2004
- Journal of Materials Research