Publications

5 results for Elmar Platzgummer

Large-field particle beam optics for projection and proximity printing and for maskless lithography
- - Hans Loeschner
  - Gerhard Stengl
  - et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Ion projection printing for patterning of magnetic media
- - Andreas Dietzel
  - Ruediger Berger
  - et al.
- 2002
- INTERMAG 2002
Ion projection direct-structuring for nanotechnology applications
- - Hans Loeschner
  - Ernest J. Fantner
  - et al.
- 2002
- MRS Proceedings 2002
Ion projection printing for patterning of magnetic media
- - A. Dietzel
  - R. Berger
  - et al.
- 2002
- INTERMAG 2002
Ion projection direct structuring for patterning of magnetic media
- - Andreas Dietzel
  - Rüdiger Berger
  - et al.
- 2002
- IEEE Transactions on Magnetics