Quality factors in micron- and submicron-thick cantilevers
- Kevin Y. Yasumura
- Timothy D. Stowe
- et al.
- 2000
- JMEMS
Publications
Date
Featured collections
Popular topics
19 results for Thomas W. Kenny
Silicon dopant imaging by dissipation force microscopy
- T.D. Stowe
- T.W. Kenny
- et al.
- 1999
- Applied Physics Letters
Intrinsic-carrier thermal runaway in silicon microcantilevers
- B.W. Chui
- M. Asheghi
- et al.
- 1999
- Microscale Thermophysical Engineering
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
- et al.
- 1999
- Applied Physics Letters
Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
- B.W. Chui
- T.W. Kenny
- et al.
- 1998
- Applied Physics Letters
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- Benjamin W. Chui
- Timothy D. Stowe
- et al.
- 1998
- JMEMS
A novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
Attonewton force detection using ultrathin silicon cantilevers
- T.D. Stowe
- K.Y. Yasumura
- et al.
- 1997
- Applied Physics Letters
Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope
- B.W. Chui
- T.D. Stowe
- et al.
- 1996
- Applied Physics Letters