Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for O. Genz

Spectroscopic anisotropy micro-ellipsometry for determination of lateral dimensions of form birefringent structures
- - H. Bloeß
  - J.W. Schultze
  - et al.
- 2002
- Thin Solid Films
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- - Arpan P. Mahorowala
  - Katherina Babich
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering