Spectroscopic anisotropy micro-ellipsometry for determination of lateral dimensions of form birefringent structures
- H. Bloeß
- J.W. Schultze
- et al.
- 2002
- Thin Solid Films
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3 results for O. Genz
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- Scott Halle
- Alan Thomas
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering