Carbon nanotube scanning probe for profiling of deep-ultraviolet and 193 nm photoresist patterns
- Cattien V. Nguyen
- Ramsey M. D. Stevens
- et al.
- 2002
- Applied Physics Letters
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3 results for Ramsey M. D. Stevens
Synthesis and characterization of polypyrrole-graft-poly(ε-caprolactone) copolymers: New electrically conductive nanocomposites
- D. Mecerreyes
- R. Stevens
- et al.
- 2002
- Synthetic Metals
Carbon nanotube scanning probe for surface profiling of DUV and 193 nm photoresist pattern
- Cattien V. Nguyen
- Ramsey M. D. Stevens
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering