Polymer-based stress sensor with integrated readout
- J. Thaysen
- A.D. Yalçinkaya
- et al.
- 2002
- Journal of Physics D: Applied Physics
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SU-8 based piezoresistive mechanical sensor
- J. Thaysen
- A.D. Yalçinkaya
- et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)