Kinetics of chemically amplified resists
- G.M. Wallraff
- W.D. Hinsberg
- et al.
- 1995
- Microlithography 1995
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3 results for D.A. Hopper
Perfluoropolyether characterization by nuclear magnetic resonance spectroscopy and gel permeation chromatography
- Tom Karis
- B. Marchon
- et al.
- 2002
- Journal of Fluorine Chemistry
Oxidation chemistry of a pentaerythritol tetraester oil
- Tom Karis
- J.L. Miller
- et al.
- 1999
- Tribology Transactions