In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations
- A. Dietzel
- R. Berger
- et al.
- 2002
- Sensors and Actuators, A: Physical
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Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)