Publications

2 results for Kris Baert

MEMS and nanotechnology - Hot or hype?
- - Mike Beunder
  - Jeanne Trinko Mechler
  - et al.
- 2004
- CICC 2004
Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
- - Sherif Sedky
  - Paolo Fiorini
  - et al.
- 1998
- JMEMS