MEMS and nanotechnology - Hot or hype?
- Mike Beunder
- Jeanne Trinko Mechler
- et al.
- 2004
- CICC 2004
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Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
- Sherif Sedky
- Paolo Fiorini
- et al.
- 1998
- JMEMS