Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
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10 results for U. Staufer
Micromachined photoplastic probe for scanning near-field optical microscopy
- G. Genolet
- M. Despont
- et al.
- 2001
- Review of Scientific Instruments
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- Terunobu Akiyama
- Andreas Tonin
- et al.
- 1998
- Sensors and Actuators, A: Physical
Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- M. Despont
- H. Gross
- et al.
- 1996
- Sensors and Actuators, A: Physical
Secondary electron imaging by means of a microfabricated electron column
- C. Stebler
- M. Despont
- et al.
- 1996
- Journal de Physique III
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
Arrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering