Time-dependent dielectric breakdown evaluation of deep trench capacitor with sidewall hemispherical, polysilicon grains for gigabit DRAM technology
- Fen Chen
- Porshia Parkinson
- et al.
- 2002
- IIRW 2002
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Is product screen enough to guarantee low failure rate for the customer?
- M.W. Ruprecht
- G. La Rosa
- et al.
- 2001
- IRPS 2001