Studies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
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3 results for K.R. Pope
Post-chemical-mechanical planarization cleaning application in metallization
- C. Huynh
- J. Chapple-Sokoi
- et al.
- 2000
- ASMC 2000
Novel Si-based composite thin films for 193/157 nm attenuated phase shift mask(APSM) applications
- S. Jay Chey
- C.R. Guarnieri
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering