Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
- Bogdan Dragnea
- Jan Preusser
- et al.
- 2001
- Applied Surface Science
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2 results for Jodi M. Szarko
Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
- Bogdan Dragnea
- Jan Preusser
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures