Publications

2 results for Zhijian Lu

High yielding self-aligned contact-process for a 0.150-μm DRAM technology
- - Thomas S. Rupp
  - David Dobuzinsky
  - et al.
- 2002
- IEEE Trans Semicond Manuf
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering