Publications

2 results for Wayne L. Gladfelter

Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates
- - Tiezhong Ma
  - Stephen A. Campbell
  - et al.
- 2001
- IEEE Transactions on Electron Devices
Low temperature chemical vapor deposition of ZrO₂ on Si(100) using anhydrous zirconium(IV) nitrate
- - Ryan C. Smith
  - Noel Hoilien
  - et al.
- 2000
- JES